KLA Tencor parts


KLA Spare parts


KLA-Tencor’s wafer manufacturing tools include inspection, review, metrology and data management systems. Specialized wafer inspection tools assess wafer surface quality and detect, count and bin defects during the wafer manufacturing process and as a critical part of outgoing wafer inspection. Wafer geometry systems ensure the wafer is extremely flat and uniform in thickness, with precisely controlled wafer surface topography. Specifications for wafer defectivity, geometry and surface quality are tightening as the dimensions of transistors become so small that the properties of the substrate can substantially affect transistor performance.

Wafer Surface and Defect Inspection

  • Surfscan SPx: Defect and surface quality inspection systems for polished wafers, epi wafers and engineered substrates
  • SURFmonitor: Defect/metrology module to monitor wafer process drift and capture low-contrast defects, for use with Surfscan SPx Series tools
  • VisEdge Family: Wafer edge defect inspection, metrology and review systems

Wafer Defect Review

  • eDR-7000 Series: SEM-based wafer defect review and classification system

Wafer Geometry and Nanotopography Metrology

  • WaferSight: Wafer thickness, shape and flatness metrology systems
  • SURFmonitor: Module for Surfscan SPx Series tool indicating sub-Angstrom surface topography variation on bare substrates

Data Management

  • FabVision: Data management system for wafer manufacturing factories
  • Klarity Defect: Data management and analysis modules for wafer manufacturing




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